High performing metal–oxide semiconductor thin-film transistors

High performing metal–oxide semiconductor thin-film transistors

For access to this article, please select a purchase option:

Buy chapter PDF
(plus tax if applicable)
Buy Knowledge Pack
10 chapters for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Your details
Why are you recommending this title?
Select reason:
VLSI and Post-CMOS Electronics. Volume 1: Design, modelling and simulation — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

This chapter provides an overview of TFTs, organic-inorganic complementary hybrid circuits and "state-of-the-art" metal-oxide-based TFTs.

Chapter Contents:

  • 12.1 Introduction
  • 12.1.1 Review of progress in oxide TFTs
  • 12.1.2 Review of progress in organic–inorganic hybrid complementary circuits
  • 12.2 TFT fabrication and characterization
  • 12.2.1 Device structure of TFTs
  • 12.2.2 Device operation of n-channel TFTs
  • 12.2.3 Current voltage characteristics of n-channel TFTs
  • 12.2.4 Device characterization of n-channel TFTs
  • Extraction of performance parameters
  • 12.3 Experimental methods used for fabrication of TFTs
  • 12.3.1 Thermal evaporation
  • 12.3.2 Fabrication steps for oxide semiconductor solution process
  • 12.4 Development of high-k gate dielectric (Al2O3) and sputtered ZnO TFTs
  • 12.4.1 Comparison of sputtered and sprayed ZnO TFTs
  • 12.4.2 IGZO TFT performance investigation using Taguchi orthogonal arrays
  • 12.5 Understanding ZnO TFT UV sensor performance using Taguchi OA
  • Acknowledgment
  • References

Inspec keywords: MOSFET; thin film transistors

Other keywords: TFT; organic-inorganic complementary hybrid circuits; metal-oxide semiconductor thin-film transistors

Subjects: Insulated gate field effect transistors

Preview this chapter:
Zoom in

High performing metal–oxide semiconductor thin-film transistors, Page 1 of 2

| /docserver/preview/fulltext/books/cs/pbcs073f/PBCS073F_ch12-1.gif /docserver/preview/fulltext/books/cs/pbcs073f/PBCS073F_ch12-2.gif

Related content

This is a required field
Please enter a valid email address