In this chapter, we describe the integration of fibre-optic signal distribution with fibre Bragg gratings (FBG) and microelectromechanical systems (MEMS) actuators to facilitate various miniature tunable fibre-optic devices for applications ranging from fibre lasers, to variable time delay lines for optical signal processing, to the sensing of various physical parameters such as temperature, pressure or acceleration including our own most recent results.

Chapter Contents:

• 8.1 Introduction
• 8.2 Microelectromechanical systems/fibre Bragg grating temperature sensing
• 8.3 Tunable fibre-optic variable delay line
• 8.4 Microelectromechanical systems/fibre Bragg grating pressure sensor
• 8.5 Inertial sensing
• 8.6 Conclusions
• References

Inspec keywords: Bragg gratings; optical information processing; pressure sensors; accelerometers; micromechanical devices; temperature measurement; fibre optic sensors; acceleration measurement; thermometers; optical tuning; optical delay lines; pressure measurement

Other keywords: fibre lasers; microelectromechanical systems actuators; microelectromechanical system; fibre Bragg gratings; optical signal processing; integrated optical devices; variable time delay lines; acceleration measurements; fibre-optic signal distribution; pressure measurements; miniature tunable fibre-optic devices; temperature measurements; MEMS actuators

Subjects: Fibre optic sensors; MEMS and NEMS device technology; Optical information, image formation and analysis; Micromechanical and nanomechanical devices and systems; Velocity, acceleration and rotation measurement; Fibre optic sensors; fibre gyros; Pressure measurement; Velocity, acceleration and rotation measurement; Gratings, echelles; Optical, image and video signal processing; Pressure and vacuum measurement; Fibre optics; Thermal variables measurement; Thermometry