The testing of MEMS resonators helps not only in verifying if the design specifications have been met but also in further optimization of the design, if necessary. In this chapter we have seen various methods to test MEMS resonator filters. As the frequency of operation of the resonators further increases, we may have to come up with specific calibration mechanisms to remove the parasitic effects.

Chapter Contents:

• 9.1 Introduction
• 9.2 S-parameters
• 9.2.1 Derivation of scattering parameter for two-port network
• 9.2.2 Conversion of S-parameter to Z-parameter
• 9.3 Conversion of S-parameter to Y-parameter
• 9.4 Network analyzers
• 9.4.1 Vector network analyzer
• 9.4.2 Spectrum analyzer
• 9.5 Signal flow graphs and error models
• 9.6 Calibration
• 9.6.1 On-wafer measurement
• 9.6.2 On wafer calibration standards
• 9.6.3 Impedance standard substrate calibration and on-wafer DUT de-embedding
• 9.6.3.1 Four-step de-embedding method
• 9.6.4 Verification of calibration
• 9.7 Calibration for off-chip measurements
• 9.8 Other testing methodologies
• 9.8.1 Optical detection
• 9.9 Measurement of intermodulation distortion in MEMS resonators
• 9.10 Summary
• References

Inspec keywords: electron device testing; resonator filters; calibration; micromechanical resonators

Other keywords: MEMS resonators testing; calibration mechanisms; resonator filters verification; design specifications; parasitic effects; MEMS resonator filters

Subjects: Passive filters and other passive networks; Design and modelling of MEMS and NEMS devices; Production facilities and engineering