Your browser does not support JavaScript!

Fabrication of low-frequency resonators

Fabrication of low-frequency resonators

For access to this article, please select a purchase option:

Buy chapter PDF
(plus tax if applicable)
Buy Knowledge Pack
10 chapters for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Your details
Why are you recommending this title?
Select reason:
MEMS Resonator Filters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

The device fabrication process for low-frequency MEMS resonator is explained in this chapter. Challenges faced during the fabrication process and experiments performed to solve those issues are also discussed. All the processes such as metal deposition, dielectric deposition, electroplating, and wet etching must be studied by performing experiments to determine its deposition and etching rate, respectively. The rate of deposition in electroplating at room temperature is very less; it can be increased by increasing the current density and temperature of the electroplating solution. Observations and measurements of dimensions and thickness need to be regularly performed after every fabrication step. It helps to confirm the correctness of the process. Physical characterization and electrical characterization need to be performed on the fabricated device to validate the proposed concept.

Chapter Contents:

  • 6.1 Introduction
  • 6.2 Fabrication processes
  • 6.2.1 Wafer cleaning process
  • 6.2.2 Oxide deposition
  • 6.2.3 Thin-film deposition
  • Physical vapor deposition
  • Sputter deposition
  • Chemical vapor deposition
  • Electrodeposition
  • Spin coating
  • Photolithography
  • Etching
  • Liftoff
  • 6.3 Device fabrication
  • 6.4 Challenges in fabrication
  • 6.5 Summary
  • References

Inspec keywords: electroplating; microfabrication; micromechanical resonators; etching

Other keywords: electroplating; physical characterization; electrical characterization; low-frequency MEMS resonator; wet etching; dielectric deposition; current density; metal deposition

Subjects: Fabrication of MEMS and NEMS devices; Deposition from liquid phases

Preview this chapter:
Zoom in

Fabrication of low-frequency resonators, Page 1 of 2

| /docserver/preview/fulltext/books/cs/pbcs065e/PBCS065E_ch6-1.gif /docserver/preview/fulltext/books/cs/pbcs065e/PBCS065E_ch6-2.gif

Related content

This is a required field
Please enter a valid email address