Electronics have become an essential part of human life. Sir Nikola Tesla said it, science proved it, it is a known fact that everything including our own bodies is made up of energy vibrating at different frequencies. The conventional microelectromechanical systems (MEMS) technology converts energy from mechanical to the electrical domain or vice versa -sensors and actuators play an irreplaceable role in our modern life and are offered by many suppliers. In contrast to their unique function, radio frequency microelectromechanical systems (RF MEMS) process electrical signals using mechanically vibrating structure and have replaced on -chip electrical RF devices to provide frequency control functions due to their extraordinary performance compared to on-chip electrical counterparts. Frequency selective elements such as resonators are being increasingly employed in applications related to timing and frequency control, and as building blocks in micro/nanofabricated oscillators and/or fi lters. With small size, high performance, and complementary metal-oxide-semiconductor (CMOS) compatibility, RF MEMS resonator offer promising technology in contemporary RF front-end in wireless communication systems.

Chapter Contents:

• 4.1 Introduction
• 4.2 Motivation and challenges
• 4.3 High frequency resonators
• 4.4 Literature survey
• 4.4.1 Introduction
• 4.5 Fundamentals of MEMS resonator
• 4.5.1 MEMS resonator
• 4.5.2 History of MEMS resonator
• 4.5.3 MEMS resonators—modes of vibration
• 4.5.4 Analogy between mechanics and electronics
• 4.6 Transduction mechanism of MEMS resonators
• 4.7 Acoustic microresonator technologies
• 4.7.1 The concepts and the working principle of acoustic wave propagation
• 4.8 The piezoelectric theory
• 4.8.1 Piezoelectric resonator modes and associated frequency
• 4.9 Piezoelectric MEMS resonator
• 4.9.1 SAW resonator
• 4.9.2 BAW resonator
• 4.9.2.1 FBAR
• 4.9.2.2 SMR
• 4.9.2.3 FBAR and SMR applications
• 4.10 Some more piezoelectric MEMS resonators by different researchers
• 4.11 Subject of investigation
• 4.12 Design and modeling of MEMS resonator
• 4.12.1 Finite element modeling
• 4.13 One port lateral field excited contour mode piezoelectric MEMS resonator
• 4.13.1 Introduction
• 4.13.2 Design and analysis of contour mode resonator
• 4.14 Finite element simulations using COMSOL™ Multiphysics
• 4.15 Mode shapes for lateral vibrating contour mode one-port resonator
• 4.16 Parameter optimization of one port contour mode MEMS resonator
• 4.16.1 Taguchi method
• 4.16.2 ANOVA statistics
• 4.17 Summary
• Acknowledgements
• References

Inspec keywords: radiofrequency integrated circuits; micromechanical resonators; CMOS analogue integrated circuits; microwave resonators

Other keywords: wireless communication systems; on-chip electrical RF devices; MEMS technology; mechanically vibrating structure; frequency control functions; RF MEMS resonator; Nikola Tesla; frequency selective elements; microelectromechanical resonator design; RF MEMS process; radio frequency microelectromechanical systems process; CMOS compatibility; complementary metal-oxide-semiconductor compatibility; microelectromechanical systems technology

Subjects: CMOS integrated circuits; Design and modelling of MEMS and NEMS devices; Microwave integrated circuits; Waveguide and microwave transmission line components