Electronics have become an essential part of human life. Sir Nikola Tesla said it, science proved it, it is a known fact that everything including our own bodies is made up of energy vibrating at different frequencies. The conventional microelectromechanical systems (MEMS) technology converts energy from mechanical to the electrical domain or vice versa -sensors and actuators play an irreplaceable role in our modern life and are offered by many suppliers. In contrast to their unique function, radio frequency microelectromechanical systems (RF MEMS) process electrical signals using mechanically vibrating structure and have replaced on -chip electrical RF devices to provide frequency control functions due to their extraordinary performance compared to on-chip electrical counterparts. Frequency selective elements such as resonators are being increasingly employed in applications related to timing and frequency control, and as building blocks in micro/nanofabricated oscillators and/or fi lters. With small size, high performance, and complementary metal-oxide-semiconductor (CMOS) compatibility, RF MEMS resonator offer promising technology in contemporary RF front-end in wireless communication systems.
Microelectromechanical resonator design for high frequency, Page 1 of 2
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