For several years, micro-electro-mechanical systems (MEMS) have been experiencing dynamic and sustained growth. This development is mainly driven by the automotive industry. One example of such a growing market is tire pressure monitoring systems (TPMS). Initiated by legal regulations in the USA and the EU (in China, laws on the mandatory use of TPMS will apply from 2020), the market has experienced its own momentum as a result of the continuous development of TPMS. In addition, the positive market development is reinforced by the continuously decreasing costs of sensors. Costs related to sensor development are the development costs, which are reflected in the time from the customer inquiry or specification to the tape out. Although the design of MEMS has been the subject of research and development activities for years, there is still a gap compared to a typical IC design environment. This chapter provides an overview of the current state of MEMS design. Using the example of a three-dimensional (3D) acceleration sensor, new approaches for efficient design and layout are shown.

Chapter Contents:

• 11.1 Introduction
• 11.2 Synthesis of MEMS designs and layouts – general aspects
• 11.3 Working principle and sensor structure
• 11.4 Technology
• 11.5 Design strategy and modelling
• 11.5.1 Library approach
• 11.5.2 Modelling
• 11.6 MEMS design and layout example
• 11.6.1 xy Acceleration unit
• 11.6.2 Accelerometer for z detection
• 11.6.3 Layout
• Acknowledgement
• References

Inspec keywords: accelerometers; acceleration measurement; circuit layout; microsensors

Other keywords: positive market development; 3D acceleration sensor; TPMS; EU; China; 3D accelerometer; USA; sensor development; IC design environment; MEMS design; microelectromechanical systems; three-dimensional acceleration sensor; tire pressure monitoring systems; automotive industry

Subjects: Sensing and detecting devices; Design and modelling of MEMS and NEMS devices; Microsensors and nanosensors; Micromechanical and nanomechanical devices and systems; Velocity, acceleration and rotation measurement; Velocity, acceleration and rotation measurement