Inspec keywords: piezoelectric actuators; nanopositioning; scanning probe microscopy; physical instrumentation control

Other keywords: damping; upper bound; nanopositioners; first mechanical resonance frequency; piezoelectric tube scanners; active shunt control; scanning probe microscopy; input scan signal harmonics; piezoelectric tube actuator; first resonant mode; triangular scan rate; scan performance; high speed nano-scale positioning

Subjects: Control of physical instruments; Positioning and alignment; manipulating, remote handling; Nanopositioning and atom manipulation; Scanning probe microscopy and related techniques