Inspec keywords: safety devices; electromechanical actuators; micromotors; linear motors; silicon-on-insulator; springs (mechanical)

Other keywords: voltage 23 V; microlever amplifications; silicon-on-insulator wafer; size 50 mum; working speed; high-speed electrothermal linear micromotor; microelectromechanical systems safety-and-arming devices; distance 500 mum; microspring; velocity 35.66 mm/s; driving force; mechanical strength; barrier plate; V-shaped electrothermal actuators

Subjects: Design and modelling of MEMS and NEMS devices; Micromotors; Control gear and apparatus; Linear machines