Inspec keywords: Hall mobility; secondary ion mass spectra; antimony; electron mobility; silicon; p-n junctions; doping profiles; electron density; elemental semiconductors

Other keywords: nanometer size resolution; carrier profiles; atomic profiles; electron concentration; Sb implanted silicon; secondary ion mass spectroscopy; Si:Sb; Hall effect measurements; ultra shallow junctions; mobility profiles

Subjects: Low-field transport and mobility; piezoresistance (semiconductors/insulators); Semiconductor junctions; Elemental semiconductors; Galvanomagnetic and other magnetotransport effects (semiconductors/insulators); Electrical properties of semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions; Impurity concentration, distribution, and gradients; Semiconductor doping; Electrical properties of elemental semiconductors (thin films/low-dimensional structures); Mass spectrometry (chemical analysis)