Inspec keywords: electron beam effects; Hall effect; elemental semiconductors; electrical conductivity of crystalline semiconductors and insulators; ion implantation; silicon; phosphorus; doping profiles; annealing

Other keywords: doping profiles; carrier concentration profiles; sheet resistivity measurements; pulsed electron beam annealing; P implanted Si; differential Hall effect; electrical activation

Subjects: Doping and implantation of impurities; Electrical conductivity of elemental semiconductors; Electron and positron effects; Lithography (semiconductor technology); Semiconductor doping; Galvanomagnetic and other magnetotransport effects (semiconductors/insulators); Elemental semiconductors; Low-field transport and mobility; piezoresistance (semiconductors/insulators)