Inspec keywords: piezoelectric actuators; ceramic capacitors; microactuators; piezoelectricity

Other keywords: industrial-grade X7R type dielectric multilayer ceramic capacitor; DC bias voltage; capacitance 10 muF; frequency 0.1 Hz to 20 Hz; hysteresis; microactuating property; temperature 15 degC to 35 degC; piezoelectric effect

Subjects: Capacitors; Piezoelectric devices; MEMS and NEMS device technology