Inspec keywords: bioMEMS; electrocardiography; electrochemical electrodes; microfabrication

Other keywords: high quality ECG signal; thin flexible capacitive electrode; electrocardiogram; long term ECG measurement; MEMS based flexible capacitive electrode; insulating layers; active shield plate; mechanical system process; ECG signal recording

Subjects: Micromechanical and nanomechanical devices and systems; Bioelectric signals; Electrical activity in neurophysiological processes; Electrodiagnostics and other electrical measurement techniques; Fabrication of MEMS and NEMS devices