Inspec keywords: gallium compounds; wide band gap semiconductors; III-V semiconductors; MOSFET; semiconductor growth; substrates; high electron mobility transistors; aluminium compounds

Other keywords: monolithic integration; HFET; differential heteroepitaxy technique; MOS; AlGaN-GaN; silicon substrates

Subjects: Insulated gate field effect transistors; Thin film growth and epitaxy; Other field effect devices