Inspec keywords: etching; masks; reflector antennas; micro-optics; optical fabrication; infrared detectors; xenon compounds

Other keywords: etching technique; resultant parabolic cavities; proper patterning mask; microparabolic reflector; isotropic xenon difluoride; pattern dependency problem; structure design; infrared antenna coupled detectors; masking pattern; proper etching recipe; optimum etching recipe; XeF2

Subjects: Photodetectors; Optical fabrication, surface grinding; Micro-optical devices and technology; Micro-optical devices and technology; Detection of radiation (bolometers, photoelectric cells, i.r. and submillimetre waves detection)