Inspec keywords: contact resistance; silicon compounds; nickel; ohmic contacts; wide band gap semiconductors; ion implantation; semiconductor-metal boundaries

Other keywords: SiC epilayers; ion implantation; specific contact resistances; p⁺ 4H-SiC; transfer length method; Ni-SiC; n⁺ 4H-SiC; sample preparation conditions; Ni ohmic contacts

Subjects: Semiconductor doping; Contact resistance, contact potential, and work functions; Other semiconductor materials; Semiconductor-metal interfaces; Doping and implantation of impurities; Electrical properties of metal-nonmetal contacts