Inspec keywords: cellular biophysics; micromechanical devices; surface energy; toxicology; photoresists; free energy; polymers; biochemistry; glass; molecular biophysics
Other keywords:
Subjects: Integrated circuits; Cellular biophysics; Physical chemistry of biomolecular solutions and condensed states; Materials for MEMS and NEMS device technology; Thermodynamic properties and entropy; Surface energy of solids; thermodynamic properties; Design and modelling of MEMS and NEMS devices