Inspec keywords: light interferometry; transducers; elemental semiconductors; spectral analysis; crystal resonators; vibration measurement; silicon

Other keywords: 5 mW; single optical source; transient response; Si microresonators; 10 mus; Michelson interferometer; micromechanical resonators; laser pulse generates; storage oscilloscope; transient excitation; FFT program

Subjects: Sensing devices and transducers; Piezoelectric and ferroelectric devices; Elemental semiconductors; Other nonelectric variables measurement