Inspec keywords: silicon compounds; acoustic resonator filters; acoustic wave reflection; annealing; acoustic resonance; tungsten; losses; zinc compounds; Q-factor; bulk acoustic wave devices; acoustic resonators

Other keywords: ZnO; return loss; duplexers; resonance characteristics; W/SiO₂ multilayer Bragg reflectors; 400 degC; Q-factor; ZnO-based FBAR devices; W-SiO₂; filters; 30 min; thermal annealing; bulk acoustic resonator devices

Subjects: Sonic and ultrasonic equipment; Acoustic wave devices