Inspec keywords: micromachining; masks; electronic engineering education; semiconductor epitaxial layers; laser beam cutting; silicon compounds; laser materials processing; laser beam machining; elemental semiconductors; micromechanical devices; wide band gap semiconductors; teaching; silicon

Other keywords: silicon nitride mask layer; SiN; MEMS structures; Si; MEMS education; MEMS fabrication; experience teaching; SiC; practical undergraduate course; microbeams; SiN cantilevers; silicon carbide mask layer; bulk micromachining silicon; laser prototype

Subjects: Materials for MEMS and NEMS device technology; Laser materials processing; Micromechanical and nanomechanical devices and systems; Fabrication of MEMS and NEMS devices; Radiation effects (semiconductor technology); Lithography (semiconductor technology); Education and training