Inspec keywords: micromechanical devices; micromachining; laser beam machining; polymers
Other keywords:
Subjects: Polymers and plastics (engineering materials science); Laser materials processing; Fabrication of MEMS and NEMS devices; Micromechanical and nanomechanical devices and systems; Laser materials processing; Materials for MEMS and NEMS device technology; Preparation of organic materials, polymers and plastics