Inspec keywords: micromechanical devices; micromachining; laser beam machining; polymers

Other keywords: MEMS application; transferring technique; BETTS-based planar microstructures; Nd:YAG laser; multilevel microstructure; polymeric microstructure; SU-8 laser micromachining combination; aspect ratio; 3D microstructure; free standing microstructure; bonding technique; exposing technique

Subjects: Polymers and plastics (engineering materials science); Laser materials processing; Fabrication of MEMS and NEMS devices; Micromechanical and nanomechanical devices and systems; Laser materials processing; Materials for MEMS and NEMS device technology; Preparation of organic materials, polymers and plastics