Inspec keywords: annealing; electrical resistivity; silicon; strain gauges; adhesive bonding

Other keywords: high temperature glass frit bonding process; Si; polysilicon strain gauges; heat treatment; adhesive; annealing; resistivity coefficient of gauge factor

Subjects: General fabrication techniques; Transducers; Friction, wear, adherence, hardness, mechanical contacts; Other heat and thermomechanical treatments; Sensing devices and transducers