Inspec keywords: amorphous semiconductors; vacuum deposition; semiconductor growth; ion beam applications; wide band gap semiconductors; nitrogen; elemental semiconductors; semiconductor doping; semiconductor thin films; carbon

Other keywords: electronic properties; nitrogen doped tetrahedral amorphous carbon film; doping efficiency; nitrogen partial pressure; C:N; ion beam assisted filtered cathodic vacuum arc deposition

Subjects: Chemical vapour deposition; Semiconductor doping; Doping and implantation of impurities; Vacuum deposition; Thin film growth, structure, and epitaxy; Structure of amorphous, disordered and polymeric materials; Elemental semiconductors; Amorphous and glassy semiconductors