Inspec keywords: solar cells; semiconductor growth; semiconductor thin films; silicon; plasma CVD; elemental semiconductors

Other keywords: supersonic free jet; initial gas molecules; high-rate deposition; polycrystalline silicon films; substrate distance; gas-jet electron-beam PECVD method; fast convective transfer; optical analyses; solar cells; morphological analyses; grain nucleation

Subjects: Chemical vapour deposition; Solar cells and arrays; Photoelectric conversion; solar cells and arrays; Thin film growth, structure, and epitaxy; Elemental semiconductors; Optical properties of elemental semiconductors (thin films, low-dimensional and nanoscale structures); Chemical vapour deposition