Inspec keywords: silicon-on-insulator; semiconductor doping; semiconductor device breakdown; MOSFET; electric fields

Other keywords: n-drift region; superjunction LDMOS; silicon-on-insulator lateral diffused MOSFET; sidewall field plate; compound field plate; breakdown voltage; lateral surface electric field; SOI LDMOS; SFP-LDMOS device

Subjects: Insulated gate field effect transistors; Semiconductor doping