Inspec keywords: sputter etching; anodised layers; surface acoustic wave devices; oxidation; microelectrodes; resists; nanotechnology; lithography

Other keywords: anodic oxidation resist films; wet etching; 15 dB; 10 GHz; nanometre electrode fabrication technology; thin anodic oxidation films; lithography techniques; 60 to 100 nm; surface acoustic wave devices; SAW filter; dry etching

Subjects: Acoustic wave devices; Lithography (semiconductor technology); Surface treatment (semiconductor technology); Thin film growth and epitaxy