Inspec keywords: boron; silicon; semiconductor doping; vacancies (crystal); ion implantation; diffusion in solids; elemental semiconductors

Other keywords: implanted source; Si; index of effectiveness; B diffusion; temperature dependence; charged vacancies

Subjects: Diffusion, migration, and displacement of impurities in solids; Doping and implantation of impurities; Semiconductor doping; Elemental semiconductors