Inspec keywords: III-V semiconductors; electrical conductivity of crystalline semiconductors and insulators; oxygen; gallium arsenide; semiconductor doping; Hall effect; ion implantation

Other keywords: damage related compensation; dopant sensitivity; localised regions; GaAs:O; Hall effect; activation; C/V profiling techniques; compensating effects; n-type dopant species

Subjects: Semiconductor doping; Galvanomagnetic and other magnetotransport effects (semiconductors/insulators); Electrical conductivity of II-VI and III-V semiconductors; II-VI and III-V semiconductors; Doping and implantation of impurities