Inspec keywords: gallium arsenide; ion implantation; deep levels; III-V semiconductors

Other keywords: GaAs; Si₃N₄ capping; ion implantation; deep level transient spectroscopy; impurity electron states; semi insulating substrate; deep levels; epitaxial buffer layer

Subjects: Doping and implantation of impurities; Semiconductor doping; Impurity and defect levels in tetrahedrally bonded nonmetals; II-VI and III-V semiconductors