Inspec keywords: microfluidics; piezoelectric transducers; silicon compounds; acoustic applications; drops; acoustic devices; laser beam machining; orifices (mechanical); membranes; micromachining

Other keywords: picoliter acoustic droplet ejection; 2D silicon nitride membrane array; higher-order resonance mode shape displacement; multiple-orifice membranes; 2D ejector arrays; resonance ejection method; femtosecond laser micromachining; picoliter droplets; Si₃N₄

Subjects: Fabrication of MEMS and NEMS devices; Design and modelling of MEMS and NEMS devices; Sonic and ultrasonic applications; Laser materials processing; Micromechanical and nanomechanical devices and systems; Laser materials processing