Inspec keywords: doping profiles; insulated gate field effect transistors; semiconductor technology

Other keywords: sidewall resistors; oxide etching; side-wall resistor; anisotropic etching; anodisation; submicron MOSFETs; n× m resistor array structure; constant-voltage anodisation; 2-D impurity profiling; doping profiling; experimental scheme; mask edge; U-groove in Sc

Subjects: Insulated gate field effect transistors; Lithography (semiconductor technology); Semiconductor doping