Inspec keywords: cobalt; acoustic resonators; semiconductor thin films; II-VI semiconductors; zinc compounds; electrodes; annealing; bulk acoustic wave devices; piezoelectric semiconductors

Other keywords: alternately deposited multilayer films; ZnO; resonance characteristic improvements; Co; Bragg reflectors; loss characteristics; cobalt electrodes; film bulk acoustic resonator; electrode patterns; thermal annealing

Subjects: Acoustic wave devices