Inspec keywords: piezoelectric devices; finite element analysis; piezoelectric materials; microfabrication; electrochemical electrodes; harmonic analysis; polymers

Other keywords: voltage 435 mV; voltage 340 V; ME; piezoelectric material; polymer substratebased piezoelectric microgenerator; self-powered sensor node; voltage 430 mV; parallel plate metal electrodes; voltage 0.9 V; voltage 2.8 V; PPE; harmonic analysis; stretching; voltage 2.3 V; mesh electrode; voltage 40 mV; bending; IDE; microsystem; FEM tool; biocompatible device; open-circuit electric potential

Subjects: Design and modelling of MEMS and NEMS devices; Fabrication of MEMS and NEMS devices; Finite element analysis; Piezoelectric and ferroelectric materials; Piezoelectric devices