Inspec keywords: laser deposition; thin films; random-access storage

Other keywords: hydrogen barrier characteristics; SiO₂; HfO₂; robust PbLa(Zr,Ti)O3 capacitor structures; electrical properties; pulse laser deposition; insulating oxide encapsulation layers; hydrogen barrier layer; Bi₃Ti₄O₁₂; hydrogen atmosphere annealing; hydrogen annealing; encapsulation oxide thin films; FeRAM integration; radio frequency sputtering; Al₂O₃; ZrO₂

Subjects: Memory circuits; Semiconductor storage