Inspec keywords: thermal stability; ion implantation; CMOS analogue integrated circuits; semiconductor doping; elemental semiconductors; integrated circuit technology; phosphorus; arsenic; resistors; silicon

Other keywords: temperature coefficient of resistance; polysilicon resistors; analogue CMOS applications; Si:P,As; P-doped polysilicon film; low TCR resistors; As ion implantation; fabrication technology; mixed doping process

Subjects: Semiconductor doping; CMOS integrated circuits