Inspec keywords: semiconductor device metallisation; solid electrolytes; antimony compounds; semiconductor storage; semiconductor doping; silver compounds; chalcogenide glasses

Other keywords: N; on-state resistance reduction; switching characteristic; SbTe chalcogenide glass; nitrogen doping effect; Ag-SbTe; programmable metallisation cell memory; control current; Ag-SbTe solid electrolyte

Subjects: Amorphous and glassy semiconductors; Electrochemical conversion and storage; Metallisation and interconnection technology; Memory circuits; Semiconductor doping