Inspec keywords: nanolithography; finite difference time-domain analysis; semiconductor growth; nanostructured materials; II-VI semiconductors; zinc compounds; nanofabrication; laser materials processing; surface plasmon resonance; etching; wide band gap semiconductors

Other keywords: size 50 nm; 2D nanoholes; SPR properties; ZnO; figure of merit; surface plasmon resonance; laser interference lithography; grating structure; three-dimensionanl finite-difference time-domain method; Au thin-film; wet etching; Au

Subjects: Surface treatment and degradation in semiconductor technology; Lithography (semiconductor technology); II-VI and III-V semiconductors; Collective excitations (surface states); Laser materials processing; Nanometre-scale semiconductor fabrication technology; Surface treatment (semiconductor technology); Laser materials processing; Nanolithography