Inspec keywords: control engineering computing; electronic engineering computing; time series; maintenance engineering; recursive estimation; life testing; autoregressive moving average processes; identification; stability criteria; vacuum pumps; chemical vapour deposition; data acquisition; integrated circuit manufacture; automatic test software

Other keywords: actual service life; preventive maintenance; in-service life determination; data acquisition system; dry vacuum pumps; semiconductor fabrication facility; ARMAX model; system model; recursive computation; future pump motor current; diagnostic system; time-series in-situ measurements; LPCVD system; online system identification software algorithm; stability criteria

Subjects: Vacuum physics; Testing; Pressure and vacuum control; Other final control equipment; Control applications in the electronics industry; Computerised instrumentation; Plant engineering, maintenance and safety; Surface treatment and coating techniques; Semiconductor industry; Control applications to materials processing; Electronic engineering computing; Production facilities and engineering; Chemical vapour deposition; Control gear and apparatus; Electronics industry; Data acquisition systems for control; Control technology and theory (production); Production engineering computing; Control engineering computing; Industrial applications of IT; Semiconductor technology; Computerised instrumentation; Instrumentation; Data acquisition systems; Maintenance and reliability