Inspec keywords: optical loss measurement; optical glass; ion implantation; germanium; integrated optics; plasma CVD; optical waveguides

Other keywords: 1550 nm; attenuation loss measurement; MeV Si ions; Ge-doped silica; ion implantation; 1300 nm; MeV Ge ions; channel waveguides; singlemode channel waveguides; germanosilicate film; plasma enhanced chemical vapour deposition

Subjects: Chemical vapour deposition; Optical testing techniques; Chemical vapour deposition; Optical waveguides and couplers; Optical waveguides; Integrated optics; Integrated optics; Optical materials; Optical glass; Optical variables measurement