Inspec keywords: microwave resonators; Q-factor; bulk acoustic wave devices; microwave filters; acoustic resonators; photolithography; micromechanical devices; electrodes; lithium compounds; crystal resonators

Other keywords: high frequency filter; RF filters; quality-factors; XBAR; resonance-antiresonance frequency spacing; free-standing platelet; narrow electrodes; frequency 5.0 GHz; crystalline Y-axis; shear-wave bulk acoustic resonances; optical photolithography; resonance frequency; frequency 3.0 GHz to 6.0 GHz; size 400 nm; laterally-excited bulk-wave resonators; 5th generation mobile phones; MEMS process; 4th generation mobile phones; LiNbO3; low-loss filters; size 500.0 nm; lithium niobate; wide band filters; piezoelectric coupling; resonance Q-factor; lateral electric fields

Subjects: Lithography (semiconductor technology); Piezoelectric devices; Passive filters and other passive networks; Acoustic wave devices; Waveguide and microwave transmission line components