Inspec keywords: semiconductor device breakdown; power semiconductor diodes; sputter etching; silicon compounds; p-i-n diodes; semiconductor device models; wide band gap semiconductors; ion implantation

Other keywords: multistep junction termination extension; single-step ion implantation; two-dimensional numerical simulations; reverse J-V curves; SiC; equipotential lines; SiC power devices; high-voltage implanted 4H-SiC pin diode; multiple dry etches; breakdown voltage

Subjects: Surface treatment (semiconductor technology); Semiconductor doping; Junction and barrier diodes; Semiconductor device modelling, equivalent circuits, design and testing; Power semiconductor devices