Inspec keywords: diffusion; elemental semiconductors; arsenic; secondary ion mass spectra; semiconductor doping; thermal management (packaging); annealing; hole density; germanium; mass spectroscopy; vacancies (crystal); boron; rapid thermal annealing
Other keywords:
hole density;
Ge substrate;
Subjects: Annealing processes; Atom-, molecule-, and ion-surface impact and interactions; Mass spectrometry (chemical analysis); Doping and implantation of impurities; Diffusion, migration, and displacement of impurities in solids; Elemental semiconductors; Semiconductor doping; Interstitials and vacancies; Annealing processes in semiconductor technology