Inspec keywords: optical fabrication; flames; surface topography measurement; light interferometry; integrated optics; laser deposition

Other keywords: flame hydrolysis deposition; wavelength 9.3 mum; stylus profiler; translated laser beam; white light interferometer; power 35.8 W; CO2; average laser power; surface roughness parameters; SiO2; flame hydrolysis deposited silica; surface roughness; CO2 laser; power 42.5 W

Subjects: Optical interferometry; Integrated optics; Chemical vapour deposition; Optical fabrication, surface grinding; Integrated optics; Spatial variables measurement; Chemical vapour deposition; Spatial variables measurement