Inspec keywords: electrical resistivity; annealing; ion beam effects; ion implantation; wide band gap semiconductors; silicon compounds
Other keywords:
Subjects: Ion beam effects; Semiconductor doping; Electrical conductivity of other crystalline inorganic semiconductors; Doping and implantation of impurities; Low-field transport and mobility; piezoresistance (semiconductors/insulators); Other semiconductor materials; Annealing processes; Annealing processes in semiconductor technology