Inspec keywords: gallium arsenide; indium compounds; reviews; ion implantation; III-V semiconductors

Other keywords: implantation/damage processes; annealing; surface passivation; ion bombardment; GaAs; reviews; InP; semiconductor doping; III-V semiconductors; ion implantation

Subjects: Doping and implantation of impurities; Ion beam effects; Reviews and tutorial papers; resource letters; Semiconductor doping; II-VI and III-V semiconductors