Inspec keywords: impurity distribution; laser beam effects; gallium arsenide; III-V semiconductors; chromium; annealing

Other keywords: GaAs:Cr; secondary ion mass spectrometry measurements; energy density; laser induced melted region; surface region; Q-switched ruby laser; Cr doped; cooling cycle; zone refining process; Cr redistribution effect; laser annealing

Subjects: Other heat and thermomechanical treatments; Impurity concentration, distribution, and gradients; Laser-surface impact phenomena; Laser applications; II-VI and III-V semiconductors