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High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control

High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control

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Piezoelectric tube scanners are the actuators of choice in scanning probe microscopy. These nanopositioners exhibit a dominant first resonant mode that is excited due to harmonics of the input scan signal. This introduces errors in the scan obtained. The presence of this resonant mode limits the upper bound of a triangular scan rate to around 1/100th of the first mechanical resonance frequency. Passive and active shunts have shown to damp this resonant mode substantially and improve scan performance. Sensorless active shunts optimised using H2 and H techniques, is designed. These shunts reduce the amplitude of the first resonant peak of a prototype tube nanopositioner by 24 dB. A triangle wave input is used to test the improvement in scan performance due to the damping achieved by these active shunts. Analysis shows that damping the resonant mode in such fashion reduces the scan error by five times.

References

    1. 1)
    2. 2)
      • E. Meyer , H.J. Hug , R. Bennewitz . (2004) Scanning probe microscopy.
    3. 3)
      • D.A. redaktor Bonnell . (2001) Scanning probe microscopy and spectroscopy – theory, techniques and applications.
    4. 4)
      • A.A. Tsenga , A. Notargiacomob , T.P. Chen . Nanofabrication by scanning probe microscope lithography: a review. J. Vac. Sci. Technol. , 3 , 877 - 894
    5. 5)
      • B.D. Gates , Q. Xu , J.C. Love , D.B. Wolfe , G.M. Whitesides . Unconventional nanofabrication. Ann. Rev. Mater. Res. , 339 - 372
    6. 6)
    7. 7)
      • D. Croft , D. McAllister , S. Devasia . High-speed scanning of piezo-probes for nano-fabrication. Trans. ASME, J. Manuf. Sci. Technol. , 617 - 622
    8. 8)
      • D. Croft , S. Stilson , S. Devasia . Optimal tracking of piezo-based nanopositioners. Nanotechnol. , 201 - 208
    9. 9)
      • G. Schitter , R.W. Stark , A. Stemmer . Fast contact-mode atomic force microscopy on biological specimens by model-based control. Ultramicroscopy , 253 - 257
    10. 10)
    11. 11)
      • H. Perez , Q. Zou , S. Devasia . Design and control of optimal scan trajectories: Scanning tunneling microscope example. J. Dyn. Sys. Meas. Control , 187 - 197
    12. 12)
      • S. Salapaka , A. Sebastion , J.P. Cleveland , M.V. Salapaka . High bandwidth nano-positioner: A robust control approach. Rev. Sci. Instrum. , 9 , 3232 - 3241
    13. 13)
    14. 14)
      • A.J. Fleming , S.O.R. Moheimani . Control oriented synthesis of high performance piezoelectric shunt impedances for structural vibration control. IEEE Trans. Control Syst. Technol. , 1 , 98 - 112
    15. 15)
      • ‘ANSI/IEEE Std. 176–1987’, 1988.
    16. 16)
    17. 17)
      • T. McKelvy , H. Akcay , L. Ljung . Subspace-based multivariable system identification from frequency-response data. IEEE Trans. Autom. Control , 960 - 979
    18. 18)
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