access icon free Characterisation of SU-8 n-doping carbon nanotube-based electronic devices

Triarylium–solphonium salt, the chemical component of the SU-8 photo resist, has been proved as an effective n-doping source for graphene. In this reported work, a study has been made of the effects of SU-8 on single walled carbon nanotube networks. The results indicate that SU-8 behaves as an electrons donor and causes an upward shift in the Fermi level. The cross-linking property of the SU-8 resembles an efficient isolator from the oxygen of the ambient. This leads to ambient-stability of this doping technique. In addition, the doping technique shows negligible defects on the CNT surface and then higher transconductance is expected to be achieved. The temperature dependence of the Raman spectra of the CNT network observed a downshift in the G-band with increasing temperature. Finally, since SU-8 is an e-beam sensitive resist as well as a photo resist, it was used to selectively dope CNTs within the substrate area.

Inspec keywords: carbon nanotubes; doping; Fermi level; photoresists; Raman spectra

Other keywords: e-beam sensitive resist; Raman spectra; electrons donor; cross-linking property; n-doping source; ambient-stability; upward shift; graphene; SU-8 photo resist; chemical component; single walled carbon nanotube networks; Fermi level; G-band; C; SU-8 n-doping carbon nanotube-based electronic devices; CNT surface; triarylium–solfonium salt

Subjects: Lithography (semiconductor technology); Fullerenes, carbon nanotubes, and related materials (engineering materials science); Fullerene, nanotube and related devices

References

    1. 1)
    2. 2)
    3. 3)
      • 17. Mounet, N., Marzari, N.: ‘High-accuracy first-principles determination of the structural, vibrational and thermodynamical properties of diamond, graphite, and derivatives’, arXiv preprint cond-mat/0412643, 2004.
    4. 4)
    5. 5)
    6. 6)
    7. 7)
    8. 8)
    9. 9)
    10. 10)
    11. 11)
    12. 12)
    13. 13)
    14. 14)
    15. 15)
      • 19. Tuinstra, F., Koenig, J.: ‘Characterization of graphite fiber surfaces with Raman spectroscopy’, J. Compos. Mater., 1970, 4, pp. 492499.
    16. 16)
    17. 17)
    18. 18)
      • 5. Chen, N., Klinke, C., Afzali, A., et al: ‘Self-aligned carbon nanotube transistors with novel chemical doping’.  IEEE Int. Electron Devices Meeting, 2004. IEDM Tech. Dig., 2004, pp. 695698.
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2015.0405
Loading

Related content

content/journals/10.1049/mnl.2015.0405
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading