Fabrication of nanochannels with complex three-dimensional structures based on a modified atomic force microscopy nanoscratching system
- Author(s): Bowen Yu 1 ; Yanquan Geng 1 ; Yongda Yan 1 ; Zhenjiang Hu 1
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View affiliations
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Affiliations:
1:
Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang 150001, People's Republic of China
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Affiliations:
1:
Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Harbin, Heilongjiang 150001, People's Republic of China
- Source:
Volume 9, Issue 10,
October 2014,
p.
707 – 711
DOI: 10.1049/mnl.2014.0264 , Online ISSN 1750-0443
© The Institution of Engineering and Technology
Received
15/05/2014,
Accepted
18/08/2014,
Revised
25/07/2014,
Published
23/09/2014
A novel manufacturing method of fabricating nanochannels with complex three-dimensional (3D) structures based on a modified atomic force microscopy (AFM) nanoscratching method is presented. By changing the moving trajectories of the AFM tip, arbitrary geometric patterns were obtained. Nanochannels consisting of the superposition of geometric figures could be fabricated through extensively controlling the scanning velocity of the AFM tip and combining the movement of the AFM tip with the high-precision stage. Machining experiments were performed to demonstrate the capability, validity and flexibility of the proposed approach. Finally, nanochannels with complex 3D structures were presented in an automated, flexible but cost-effective way.
Inspec keywords: nanoelectromechanical devices; atomic force microscopy; nanofabrication
Other keywords: nanochannel fabrication; scanning velocity; modified atomic force microscopy nanoscratching system; geometric patterns; machining; complex three-dimensional structures; AFM tip
Subjects: Fabrication of MEMS and NEMS devices; Micromechanical and nanomechanical devices and systems
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