© The Institution of Engineering and Technology
Using the structured diaphragm with a centre boss and four peninsulas (CBP structure), a high sensitivity and high linearity pressure sensor for low pressure ranges was demonstrated. The finite element analysis indicated that the CBP structure could achieve a far better performance than other typical structures for low pressure applications. In accordance with the simulation, the fabricated pressure sensor showed a sensitivity of 21.0 mV/V full-scale output and a nonlinearity error of 0.15% full-scale span in the pressure range of 0–5 kPa. The sensors with the CBP structure are potentially a better choice for measuring low pressures.
References
-
-
1)
-
B. Tian ,
Y.L. Zhao ,
Z.D. Jiang
.
The design and analysis of beam-membrane structure sensors for micropressure measurement.
Rev. Sci. Instrum.
,
4
-
2)
-
2. Marco, S., Samitier, J., Ruiz, O., Esteve, J.: ‘High-performance piezoresistive pressure sensors for biomedical applications using very thin structured membranes’, Meas. Sci. Technol., 1996, 7, (9), pp. 1195–1203 (doi: 10.1088/0957-0233/7/9/002).
-
3)
-
9. Bao, M.H., Yu, L.Z., Wang, Y.: ‘Stress concentration structure with front beam for pressure sensor’, Sens. Actuators A, 1991, 28, (2), pp. 105–122 (doi: 10.1016/0924-4247(91)85019-K).
-
4)
-
H. Sandmaier ,
K. Kuhl
.
A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges.
IEEE Trans. Electron Devices
,
10 ,
1754 -
1759
-
5)
-
W.P. Eaton ,
J.H. Smith
.
Micromachined pressure sensors: review and recent development.
Smart Mater. Struct.
,
530 -
539
-
6)
-
A. Berns ,
U. Buder ,
E. Obermeier ,
A. Wolter ,
A. Leder
.
AeroMEMS sensor array for high-resolution wall pressure measurements.
Sens. Actuators A, Phys.
,
104 -
111
-
7)
-
6. Yasukawa, A., Shimazoe, M., Matsuoka, Y.: ‘Simulation of circular silicon pressure sensor with a center boss for very low pressure measurement’, IEEE Trans. Electron Devices, 1989, 36, (7), pp. 1295–1302 (doi: 10.1109/16.30935).
-
8)
-
13. Yu, Z.L., Zhao, Y.L., Sun, L., Tian, B., Jiang, Z.D.: ‘Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor’, Rev. Sci. Instrum., 2013, 84, (1), pp. 015004 () (doi: 10.1063/1.4775603).
-
9)
-
10. Johnson, R.H., Karbassi, S., Sridhar, U., Speldrich, B.: ‘A high sensitivity ribbed and bossed pressure transducer’, Sens. Actuators A, 1993, 35, (2), pp. 93–99 (doi: 10.1016/0924-4247(92)80146-T).
-
10)
-
15. Chiou, J.A., Chen, S.: ‘Pressure nonlinearity of micromachinedpiezoresistive pressure sensors with thin diaphragms under high residual stresses’, Sens. Actuators A, 2008, 147, (1), pp. 332–339 (doi: 10.1016/j.sna.2008.03.012).
-
11)
-
14. Yu, Z.L., Zhao, Y.L., Meng, X.W., Tian, B., Jiang, Z.D.: ‘Absolute micro pressure measurements based on a high-overload-resistance sensor’, Micro Nano Lett., 2012, 7, (12), pp. 1180–1183 (doi: 10.1049/mnl.2012.0549).
-
12)
-
4. Barlian, A.A., Park, W.T., Mallon, J.R., Rastegar, A.J., Pruitt, B.L.: ‘Review: semiconductor piezoresistance for microsystems’, Proc. IEEE, 2009, 97, (3), pp. 513–552 (doi: 10.1109/JPROC.2009.2013612).
-
13)
-
3. Patel, S.N., Reynolds, M.S., Abowd, G.D.: ‘Detecting human movement by differential air pressure sensing in HVAC system ductwork: an exploration in infrastructure mediated sensing’, IEEE Pervasive Comput., 2008, 5013, pp. 1–18.
-
14)
-
11. Hein, S.: ‘Piezoresistive silicon sensor for very low pressures based on the concept of stress concentration’. Solid State Sensors and Actuators Transducers'93 Conf., Yokohama, Japan, 1993, 93, pp. 628–631.
-
15)
-
8. Kinnell, P.K., King, J., Lester, M., Craddock, R.: ‘A hollow stiffening structure for low-pressure sensors’, Sens. Actuators A, 2010, 160, (1), pp. 35–41 (doi: 10.1016/j.sna.2010.03.024).
http://iet.metastore.ingenta.com/content/journals/10.1049/mnl.2014.0154
Related content
content/journals/10.1049/mnl.2014.0154
pub_keyword,iet_inspecKeyword,pub_concept
6
6